myfshortalignedpwm sd 1 24 17 0 39 0 3 0 0 2 4 39 0 5 13 0 1 12 13 0 0 34 14 0 38 1 5 0 0 0 9 39 0 mefpwm sd 1 6 3 107 73 113 117 114 1 125 17 97 9 0 0 0 0 0 1 0 2 4 1 0 0 2 0 1 0 0 103 18 112 18 52 10 8 10 123 0 3 srfpwm sd 1 0 0 13 14 10 4 14 8 6 0 20 20 0 0 0 0 0 1 0 0 0 0 0 0 4 0 2 0 14 18 0 0 7 6 6 16 4 11 0 2 tefpwm sd 1 4 9 0 12 0 0 0 0 4 0 1 6 0 12 0 0 0 12 11 1 6 4 1 3 0 0 0 0 0 0 0 6 6 1 0 0 0 12 12 0 1 7 0 1